AG Services
AG Services


The AG Services senior engineering team has over 100 years combined experience with all aspects of semiconductor capital equipment design, processing, sales, and support. We specialize in delivering simplified, robust, cost-effective technology solutions


  • Systems and Module Design Services - design, assembly & testing  
    RF power delivery and tuning experts  
    Vacuum system configuration & optimization  
    Process Gas Distribution - including Toxic & Corrosives  
    Power & Control subsystems  


  • Automation upgrades  (Windows® GUI-HMI) 
    The APC-2000™ controller for Plasma & PVD systems 
    Graphical user interface - Ergonomically designed 
    BASIC language control software easily modified by user 
    Low noise Analog and Digital I/O modules 
    Easy to maintain and upgrade with common PC components 
    Automatic and Manual modes - Service access limited by login code 
    Batch and recipe editor - Event and Datalog with lot tracking features 


  • Service excellence for vacuum & plasma systems 
    Emergency repairs - large parts inventory on site 
    Comprehensive service agreements 
    Productivity enhancement & reliability improvement kits 
    RF analysis and optimization 
    Vacuum leak checking, diagnostics, & repairs 
    Start up and customer training services for OEM's 


  • Quality Parts available for vacuum & plasma systems 
    Consumables (kits, o-rings, view ports, lamps, Fomblin®) 
    Replacement parts (switches, valves, machined parts) 
    Major modules (controllers, power supplies, chillers) 
    Consulting services for every vacuum & plasma processing need 


Small or large, your request will be met with expert advice, individualized attention, and innovative solutions. Contact us and discover all we have to offer. Our staff is looking forward to speaking with you.

We offer complete systems support.
Call today for details about how we can help you!

Contact Us Today!

AG Services
3064 Kenneth St

Santa Clara, CA 95054

Phone: 408-855-8686


Print | Sitemap
© AG Services