Services

Systems and Module Design Services - design, assembly & testing  
RF power delivery and tuning experts  
Vacuum system configuration & optimization  
Process Gas Distribution - including Toxic & Corrosives  
Power & Control subsystems  
 

Automation upgrades  (Windows® GUI-HMI) 
The APC-2000™ controller for Plasma & PVD systems 
Graphical user interface - Ergonomically designed 
BASIC language control software easily modified by user 
Low noise Analog and Digital I/O modules 
Easy to maintain and upgrade with common PC components 
Automatic and Manual modes - Service access limited by login code 
Batch and recipe editor - Event and Datalog with lot tracking features 
 

Service excellence for vacuum & plasma systems 
Emergency repairs - large parts inventory on site 
Comprehensive service agreements 
Productivity enhancement & reliability improvement kits 
RF analysis and optimization 
Vacuum leak checking, diagnostics, & repairs 
Start up and customer training services for OEM's 
 

Quality Parts available for vacuum & plasma systems 
Consumables (kits, o-rings, view ports, lamps, Fomblin®) 
Replacement parts (switches, valves, machined parts) 
Major modules (controllers, power supplies, chillers) 
Consulting services for every vacuum & plasma processing need